Title:
不良検査装置
Document Type and Number:
Japanese Patent JP4842533
Kind Code:
B2
Abstract:
A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.
Inventors:
Tsutomu Saito
Yamada Osamu
Sakae Hazaki
Yasuhiko Nara
Hirofumi Sato
Kaichi Inada
Yoshinori Numata
Yamada Osamu
Sakae Hazaki
Yasuhiko Nara
Hirofumi Sato
Kaichi Inada
Yoshinori Numata
Application Number:
JP2004311865A
Publication Date:
December 21, 2011
Filing Date:
October 27, 2004
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G01R31/302; H01L21/66
Domestic Patent References:
| JP2002181898A | ||||
| JP2000147070A | ||||
| JP2004253492A | ||||
| JP10162766A |
Attorney, Agent or Firm:
Yukihiko Takada