Title:
化合物半導体の製造方法
Document Type and Number:
Japanese Patent JP4852795
Kind Code:
B2
Inventors:
Masaki Ueno
Kensaku Motoki
Kensaku Motoki
Application Number:
JP2001162639A
Publication Date:
January 11, 2012
Filing Date:
May 30, 2001
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/38; H01L21/205; H01L33/32; H01S5/323
Domestic Patent References:
| JP2000252217A | ||||
| JP2000101140A |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Tatsuya Shioda
Shiro Terasaki
Masatoshi Shibata
Atsushi Kokubun
Tatsuya Shioda
Shiro Terasaki
Masatoshi Shibata
Atsushi Kokubun