Title:
流量計測装置およびこの装置を用いたガス供給システム
Document Type and Number:
Japanese Patent JP4862698
Kind Code:
B2
Inventors:
Miyata Hajime
Yoichi Ito
Kenichi Kamon
Yoichi Ito
Kenichi Kamon
Application Number:
JP2007058367A
Publication Date:
January 25, 2012
Filing Date:
March 08, 2007
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01F3/22; G01F1/66
Domestic Patent References:
| JP2007024750A | ||||
| JP2005265529A | ||||
| JP2006200802A | ||||
| JP2003075220A |
Foreign References:
| WO2000016044A1 |
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii
Daisuke Nagano
Kentaro Fujii