Title:
カーボンナノチューブエミッタを具備する電界放出ディスプレイ及びその製造方法
Document Type and Number:
Japanese Patent JP4869573
Kind Code:
B2
Abstract:
Provided is a field emission display (FED) with a carbon nanotube emitter and a method of manufacturing the same. A gate stack that surrounds the CNT emitter has a mask layer that covers an emitter electrode adjacent to the CNT emitter, and a gate insulating film, a gate electrode, a focus gate insulating film (SiOx, X<2), and a focus gate electrode formed on the mask layer. The focus gate insulating film has a thickness 2 mum or more, and preferably 3~15 mum and is preferably made using PECVD. A flow rate of silane and nitric acid for forming the focus gate insulating film and/or the gate insulating film are maintained at 50~700 sccm and 700~4,500 sccm, respectively. By doing so and by making the oxide thick, the oxide is less apt to crack and thus less apt to generate a leakage current.
Inventors:
Choi Bin
Andrey Zoulcarnive
Andrey Zoulcarnive
Application Number:
JP2004233675A
Publication Date:
February 08, 2012
Filing Date:
August 10, 2004
Export Citation:
Assignee:
SAMSUNG SDI Co., LTD.
International Classes:
H01J29/04; H01J31/12; H01J1/05; H01J1/14; H01J1/304; H01J3/02; H01J9/02; H01J9/04; H01J9/12; H01J9/14; H01J29/02; H01J29/48
Domestic Patent References:
| JP2002245928A | ||||
| JP2002270084A | ||||
| JP2003197087A | ||||
| JP2002246310A | ||||
| JP2001332169A | ||||
| JP9134687A | ||||
| JP7282720A | ||||
| JP8162008A | ||||
| JP2004235150A | ||||
| JP2000323018A | ||||
| JP2001351512A |
Attorney, Agent or Firm:
Takashi Watanabe
Masatake Shiga
Masatake Shiga