Title:
搬送装置、搬送方法および成膜装置
Document Type and Number:
Japanese Patent JP4902561
Kind Code:
B2
Inventors:
Nakagame Masami
Application Number:
JP2008019375A
Publication Date:
March 21, 2012
Filing Date:
January 30, 2008
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
B65H20/02
Domestic Patent References:
| JP60117420A |
Attorney, Agent or Firm:
Nozomi Watanabe
Haruko Sanwa
Haruko Sanwa