信頼性の高い膜の破断を検知する方法およびシステム

Title:

信頼性の高い膜の破断を検知する方法およびシステム

Document Type and Number:

Japanese Patent JP4903464

Kind Code:

B2

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Inventors:

Kawamitsu Akinori
Inoue
Makoto Fukuda

Application Number:

JP2006074594A

Publication Date:

March 28, 2012

Filing Date:

March 17, 2006

Export Citation:

Assignee:

METAWATER Co., Ltd.

International Classes:

B01D65/10

Domestic Patent References:

Attorney, Agent or Firm:

Toshio Ebata

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