Title:
有機電子素子の製造方法およびそれによって製造された有機電子素子
Document Type and Number:
Japanese Patent JP4908583
Kind Code:
B2
Abstract:
The present invention provides a fabrication method for an organic electronic device comprising a step of stacking sequentially a first electrode made of a metal, one or more organic material layers, and a second electrode on a substrate, wherein the method comprises the steps of: 1) forming a layer on the first electrode using a metal having a higher oxidation rate than the first electrode before forming the organic material layer, 2) treating the layer formed using a metal having a higher oxidation rate than the first electrode with oxygen plasma to form a metal oxide layer, and 3) treating the metal oxide layer with inert gas plasma to remove a native oxide layer on the first electrode, and an organic electronic device fabricated by the same method.
Inventors:
Jun-Hyun Lee
Jun-Boon Kim
Jun-Boon Kim
Application Number:
JP2009509436A
Publication Date:
April 04, 2012
Filing Date:
May 10, 2007
Export Citation:
Assignee:
LG HAUSYS,LTD.
International Classes:
H05B33/10; H01L29/786; H01L51/05; H01L51/40; H01L51/42; H01L51/50; H05B33/26
Domestic Patent References:
| JP8185973A |
Attorney, Agent or Firm:
Sumio Tanai
Shinya Mitsuhiro
Shinya Mitsuhiro