Title:
移載装置
Document Type and Number:
Japanese Patent JP4909249
Kind Code:
B2
More Like This:
Inventors:
Hiroki Inoue
Application Number:
JP2007311911A
Publication Date:
April 04, 2012
Filing Date:
December 03, 2007
Export Citation:
Assignee:
Actes Co., Ltd.
International Classes:
H01L21/68; H01L21/50; H01L21/67
Domestic Patent References:
| JP2000012568A | ||||
| JP9283543A | ||||
| JP2006341361A |
Attorney, Agent or Firm:
Yoshiaki Fujino