Title:
液剤滴下装置
Document Type and Number:
Japanese Patent JP4949115
Kind Code:
B2
Inventors:
Tsutomu Ito
Akira Sawamori
Shimizu Soji
Takeyuki Hasegawa
Akira Sawamori
Shimizu Soji
Takeyuki Hasegawa
Application Number:
JP2007105087A
Publication Date:
June 06, 2012
Filing Date:
April 12, 2007
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
B05C5/00; F16K3/02; G02F1/1341
Domestic Patent References:
| JP2003190871A | ||||
| JP2005133899A | ||||
| JP9269071A | ||||
| JP49093930A |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda