Title:
走査プローブ顕微鏡及びその動作方法
Document Type and Number:
Japanese Patent JP4960451
Kind Code:
B2
Abstract:
The scanning probe microscope has a primary control loop (7, 11, 12) for keeping the phase and/or amplitude of deflection at constant values as well as a secondary control loop (9) that e.g. keeps the frequency of the cantilever oscillation constant by applying a suitable DC voltage to the probe while, at the same time, a conservative AC excitation is applied thereto. By actively controlling the frequency with the first control loop (7, 11, 12) and subsequently controlling the DC voltage in order to keep the frequency constant, a fast system is created that allows to determine the contact potential difference or a related property of the sample (3) quickly.
Inventors:
Ziegler, Dominic
Stemer, Andreas Christian
Richen, Jörg
Stemer, Andreas Christian
Richen, Jörg
Application Number:
JP2009519771A
Publication Date:
June 27, 2012
Filing Date:
July 14, 2006
Export Citation:
Assignee:
SPECS Zurich GmbH
International Classes:
G01Q60/40; G01Q10/00; G01Q80/00; G01Q10/06; G01Q60/30
Domestic Patent References:
| JP2004294218A | ||||
| JP6201373A | ||||
| JP11023588A |
Other References:
JACOBS H O,REVIEW OF SCIENTIFIC INSTRUMENTS,米国,AMERICAN INSTITUTE OF PHYSICS,1999年 3月,V70 N3,P1756-1760
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Tetsuya Kazama
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Katsu Sunagawa
Tetsuya Kazama