Title:
基板支持装置組立方法および基板支持装置組立支援装置
Document Type and Number:
Japanese Patent JP4972496
Kind Code:
B2
Inventors:
Takeshi Kondo
Application Number:
JP2007224561A
Publication Date:
July 11, 2012
Filing Date:
August 30, 2007
Export Citation:
Assignee:
Fuji Machine Manufacturing Co., Ltd.
International Classes:
H05K13/04
Domestic Patent References:
| JP2004221165A | ||||
| JP54048350U |
Attorney, Agent or Firm:
Kobe Norikazu
Mitsutoshi Sato
Mitsutoshi Sato