Title:
環状化合物、並びにそれからなるフォトレジスト基材及び組成物
Document Type and Number:
Japanese Patent JP4976697
Kind Code:
B2
Inventors:
Takanori Owada
Application Number:
JP2006019687A
Publication Date:
July 18, 2012
Filing Date:
January 27, 2006
Export Citation:
Assignee:
IDEMITSU KOSAN CO.,LTD.
International Classes:
C07C69/734; G03F7/039; H01L21/027
Domestic Patent References:
| JP10115927A | ||||
| JP2003321423A | ||||
| JP2002328473A | ||||
| JP11322656A | ||||
| JP2000191600A | ||||
| JP10161349A | ||||
| JP5113663A | ||||
| JP11035551A |
Foreign References:
| WO2005097725A1 | ||||
| WO2005075398A1 |
Attorney, Agent or Firm:
Kihei Watanabe