Title:
基板搬送装置
Document Type and Number:
Japanese Patent JP4976922
Kind Code:
B2
Inventors:
Shinichiro Mizuguchi
Hajime Ishida
Masaaki Matsuda
Hajime Ishida
Masaaki Matsuda
Application Number:
JP2007141492A
Publication Date:
July 18, 2012
Filing Date:
May 29, 2007
Export Citation:
Assignee:
Oak Manufacturing Co., Ltd.
International Classes:
H01L21/677; B25J15/06; B65G49/06; H01L21/027
Domestic Patent References:
| JP7147315A | ||||
| JP9162264A | ||||
| JP2002313884A | ||||
| JP6067953U | ||||
| JP7306153A |
Attorney, Agent or Firm:
Isono Dozo
Etsuo Tada
Etsuo Tada