ダイシング用粘着シート、及びそれを用いたダイシング方法

Title:

ダイシング用粘着シート、及びそれを用いたダイシング方法

Document Type and Number:

Japanese Patent JP4993662

Kind Code:

B2

Abstract:

To provide a pressure-sensitive adhesive sheet for dicing slightly forming filamentous wastes during dicing without deteriorating product quality or causing disadvantages to cost and to provide a method for dicing using the pressure-sensitive adhesive sheet for dicing.

The pressure-sensitive adhesive sheet 10 for dicing has a pressure-sensitive adhesive layer 12 on at least one surface of a substrate 11. Furthermore, the substrate 11 is provided with a multilayer structure having a layer 11a containing an ethylenic resin having ≤95°C melting point. The pressure-sensitive adhesive sheet for dicing is characterized in that the thickness of the layer 11a is ≥1/2 of the total thickness of the substrate 11.

Inventors:

Masashi Yamamoto

Application Number:

JP2006102104A

Publication Date:

August 08, 2012

Filing Date:

April 03, 2006

Export Citation:

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Assignee:

NITTO DENKO CORPORATION

International Classes:

C09J7/02; C09J4/00; H01L21/301

Domestic Patent References:

JP2004303999A
JP5156214A
JP2003257894A

Attorney, Agent or Firm:

Patent Business Corporation Unias International Patent Office
Koichi Kajisaki
Yuzo Ozaki
Toshihiko Taniguchi

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