Title:
超低屈折率膜の作製方法
Document Type and Number:
Japanese Patent JP5002135
Kind Code:
B2
Inventors:
Natsuki Tsukahara
Hirohiko Murakami
Hirohiko Murakami
Application Number:
JP2005176707A
Publication Date:
August 15, 2012
Filing Date:
June 16, 2005
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
G02B1/11; C04B38/06
Domestic Patent References:
| JP2001202827A | ||||
| JP2003158125A | ||||
| JP2001351911A | ||||
| JP2004143029A |
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida
Masashi Yoshioka
Shinichi Abe
Yuji Tsujida
Masashi Yoshioka