Title:
欠陥検査装置及び欠陥検査方法
Document Type and Number:
Japanese Patent JP5002961
Kind Code:
B2
Inventors:
Okuyama Shinji
Hiroshi Kondo
Hiroshi Kondo
Application Number:
JP2006004073A
Publication Date:
August 15, 2012
Filing Date:
January 11, 2006
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/66; G01B11/30; G01N21/956
Domestic Patent References:
| JP11237345A | ||||
| JP10047949A | ||||
| JP2004507101A |
Foreign References:
| WO2003028089A1 |
Attorney, Agent or Firm:
Junichi Omori