Title:
静電チャックの診断方法、真空処理装置及び記憶媒体
Document Type and Number:
Japanese Patent JP5003102
Kind Code:
B2
Abstract:
To predict the service life of an electrostatic chuck by a simple method. The method includes: electrostatically absorbing a substrate by an electrostatic chuck provided on the upper part of a placing pedestal, regularly executing a diagnostic recipe as the same plasma processing in executing plasma treatment for the substrate, adjusting the pressure of a backside gas supplied to a gap between the front surface of the electrostatic chuck and the rear surface of the substrate so that the temperature of each substrate may become a defined temperature at this time, recording the pressure of the backside gas after adjustment, and monitoring a change with time in the pressure of the backside gas. In this way, the service life of the electrostatic chuck can be easily predicted.
Inventors:
Yasuharu Sasaki
Takeshi Okagi
Takeshi Okagi
Application Number:
JP2006293040A
Publication Date:
August 15, 2012
Filing Date:
October 27, 2006
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/677; H01L21/683; H02N13/00
Domestic Patent References:
| JP9232415A | ||||
| JP11507473A | ||||
| JP5049904A | ||||
| JP6124916A | ||||
| JP2006511959A | ||||
| JP2006156938A | ||||
| JP2003133404A |
Attorney, Agent or Firm:
Toshio Inoue