Title:
超短パルスレーザを用いた微細加工方法及び装置
Document Type and Number:
Japanese Patent JP5008052
Kind Code:
B2
Inventors:
Junichi Ikeno
Sei Omori
Masahiro Anzai
Sei Omori
Masahiro Anzai
Application Number:
JP2006051965A
Publication Date:
August 22, 2012
Filing Date:
February 28, 2006
Export Citation:
Assignee:
Saitama University
RIKEN
RIKEN
International Classes:
B23K26/36; B23K26/02; C03C15/00
Domestic Patent References:
| JP11077341A | ||||
| JP11216578A | ||||
| JP2004339538A | ||||
| JP2004354535A |
Attorney, Agent or Firm:
Ohashi
Hayashi Hiroki
Hayashi Hiroki