薄片状の被測定物の形状測定装置 - KABUSHIKI KAISHA KOBE SEIKO SHO

Title:

薄片状の被測定物の形状測定装置

Document Type and Number:

Japanese Patent JP5009560

Kind Code:

B2

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Inventors:

Tsutomu Morimoto
Hiroyuki Takamatsu

Application Number:

JP2006179995A

Publication Date:

August 22, 2012

Filing Date:

June 29, 2006

Export Citation:

Assignee:

KABUSHIKI KAISHA KOBE SEIKO SHO

International Classes:

G01B7/06; G01B7/28; G01B11/06; G01B11/24; G01B21/08; G01B21/20

Domestic Patent References:

Foreign References:

WO2006018961A1

Attorney, Agent or Firm:

Takenaka Yoshimichi
Seiji Kameoka
Hironori Takenaka
Toru Sakatani

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