Title:
電界効果トランジスタ
Document Type and Number:
Japanese Patent JP5020436
Kind Code:
B2
Inventors:
Takashi Aigo
Noboru Otani
Hirokatsu Yashiro
Tatsuo Fujimoto
Masakazu Katsuno
Noboru Otani
Hirokatsu Yashiro
Tatsuo Fujimoto
Masakazu Katsuno
Application Number:
JP2001067570A
Publication Date:
September 05, 2012
Filing Date:
March 09, 2001
Export Citation:
Assignee:
Nippon Steel Corporation
International Classes:
H01L29/78; H01L29/812; H01L21/336; H01L21/338
Domestic Patent References:
| JP2000319099A | ||||
| JP7131016A | ||||
| JP2001160656A | ||||
| JP2002076329A | ||||
| JP2002076023A |
Attorney, Agent or Firm:
Mikio Hatta
Atsushi Nogami
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Atsushi Nogami
Yasuo Nara
Etsuko Saito
Katsuyuki Utani