Title:
透光性硬質薄膜
Document Type and Number:
Japanese Patent JP5025038
Kind Code:
B1
Abstract:
A translucent hard thin film having high transmissivity and film strength is provided. The translucent hard thin film of the present invention is composed of a laminated film 102 formed on a substrate S surface, wherein the laminated film 102 has a superlattice structure obtained by stacking a plurality of SiO 2 layer 104 and SiC layers 106 alternately and the entire film thickness is 3000nm or more. A film thickness per layer is 5 to 30nm in a SiC layer and 30% to 60% of that of the SiO 2 layer in a SiC layer.
Inventors:
Takuya Sugawara
Aoshima Hikaru
Ginger Tomomatsu
Ichiro Shiono
Aoshima Hikaru
Ginger Tomomatsu
Ichiro Shiono
Application Number:
JP2012518682A
Publication Date:
September 12, 2012
Filing Date:
February 16, 2012
Export Citation:
Assignee:
Syncron Co., Ltd.
International Classes:
C23C14/06; C23C14/08
Domestic Patent References:
| JPS63113507A | 1988-05-18 | |||
| JPS61237492A | 1986-10-22 | |||
| JPS6362867A | 1988-03-19 | |||
| JP2001234338A | 2001-08-31 | |||
| JP2004335325A | 2004-11-25 |
Attorney, Agent or Firm:
Koichiro Okura