Title:
メタルマスクの製造方法及びそれにより製造されたメタルマスク
Document Type and Number:
Japanese Patent JP5033438
Kind Code:
B2
Inventors:
Hiroshi Yui
Application Number:
JP2007033739A
Publication Date:
September 26, 2012
Filing Date:
February 14, 2007
Export Citation:
Assignee:
Bonmark Co., Ltd.
International Classes:
G03F1/00; G03F7/20; G03F7/40; H01L21/027
Domestic Patent References:
| JP2002105621A | ||||
| JP63209128A | ||||
| JP9279367A | ||||
| JP2003043698A | ||||
| JP2005064023A |
Attorney, Agent or Firm:
Shoji Mizoi