To provide a high-precision crystal vibrator which is compact in size and low in power consumption.

The crystal vibrator 10 has a crystal vibration piece 20 composed of a base 21, a pair of vibration arms 30 and 40 extended from the base 21 in parallel with each other along the Y axis, and electrodes 51 to 54 provided on a top surface 31, a reverse surface 32, and an external side face 33 of the vibration arm 30, and electrodes 56 to 59 provided on a top surface 41, a reverse surface 42, and an external side face 43 of the vibration arm 40. In a direction to the internal flank 34 (in the crystal axis direction of a crystal) where the top surface 31 of the vibration arm 30 is divided into two along an X axis, a piezoelectric thin film element 100 is formed by forming a piezoelectric thin film 71 and an electrode 55 on the top surface thereof. In a direction to the external side face 43 (in the crystal axis direction of the crystal) where the top surface 41 of the vibration arm 40 is divided into two along the X axis, a piezoelectric thin film element 101 is formed by forming a piezoelectric thin film 72 and an electrode 60 on the top surface thereof. Then the crystal vibration chip 20 and piezoelectric thin film elements 100 and 101 are connected in series.

COPYRIGHT: (C)2008,JPO&INPIT