Title:
二ホウ化マグネシウム超電導薄膜の作製方法および二ホウ化マグネシウム超電導薄膜
Document Type and Number:
Japanese Patent JP5041734
Kind Code:
B2
Abstract:
A superconducting magnesium diboride (MgB2) thin film showing a high critical current density to an angle of an applied magnetic field for a wide range is provided. Columnar crystal grains of MgB2 grow with the same tilted to the normal line of the substrate by supplying a magnesium (Mg) flux and a boron (B) flux from direction tilted each to the normal axis of a substrate in high vacuum. The superconducting magnesium diboride (MgB2) thin film comprising a plurality of layers containing MgB2 columnar crystal grains with the angle of the grain boundaries being different from each other is formed by controlling the angle of supplying the magnesium (Mg) flux and the boron (B) flux to the substrate.
More Like This:
Inventors:
Hiroyuki Yamamoto
Akira Tsukamoto
Haruhiro Hasegawa
Kazuo Saito
Akira Tsukamoto
Haruhiro Hasegawa
Kazuo Saito
Application Number:
JP2006143472A
Publication Date:
October 03, 2012
Filing Date:
May 24, 2006
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
C01B35/04; C01G1/00; H01B12/06; H01B13/00; H01L39/24
Domestic Patent References:
| JP2003158308A | ||||
| JP2003158307A | ||||
| JP1071018A | ||||
| JP2003206134A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation