Title:
ターゲット
Document Type and Number:
Japanese Patent JP5069201
Kind Code:
B2
Inventors:
Kunihiro Oda
Application Number:
JP2008287512A
Publication Date:
November 07, 2012
Filing Date:
November 10, 2008
Export Citation:
Assignee:
jx Nippon Mining & Metals Co., Ltd.
International Classes:
C23C14/34; H01L21/285; C22F1/00; C22F1/18
Domestic Patent References:
| JP2001040470A | ||||
| JP2002530534A | ||||
| JP5508509A | ||||
| JP2002518593A |
Foreign References:
| US6193821 |
Attorney, Agent or Firm:
Isamu Ogoshi