ITO粉および透明導電性膜並びにその成膜方法

Title:

ITO粉および透明導電性膜並びにその成膜方法

Document Type and Number:

Japanese Patent JP5070554

Kind Code:

B2

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Inventors:

Tatsumi Inamura
M. Mogi
Yoshifumi Horikawa
Koichiro Ejima

Application Number:

JP2001299862A

Publication Date:

November 14, 2012

Filing Date:

September 28, 2001

Export Citation:

Assignee:

dowa Electronics Co., Ltd.

International Classes:

C01G19/00; H01B1/00; H01B1/08; H01B5/14; H01B13/00

Domestic Patent References:

Attorney, Agent or Firm:

Komatsu Taka
Kenji Wada

Previous Patent: JPS5070553

Next Patent: パルス波形の電源を制御するための回路および方法