Title:
プローブ装置
Document Type and Number:
Japanese Patent JP5071131
Kind Code:
B2
Abstract:
A probe apparatus includes a first stage, a second stage, a third stage and an image pickup. A Z position measuring unit measures a Z direction position of the mounting table and has a Z scale extending in the Z direction and a reading unit for reading the Z scale. A computation unit obtains a calculated contact position between the probes and the electrode pads of the substrate to be inspected based on images picked up by the image pickup with respect to a coordinate position on coordinates of a driving system which includes a Z direction position and X and Y direction positions measured by a measuring unit for measuring X and Y direction positions of the mounting table. A correcting unit corrects the Z direction position of the contact position based on the change amount thereof for a next contact operation.
Inventors:
Kazuya Yano
Hiroshi Shimoyama
Masaru Suzuki
Hiroshi Shimoyama
Masaru Suzuki
Application Number:
JP2008021434A
Publication Date:
November 14, 2012
Filing Date:
January 31, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
G01R31/28; H01L21/66
Domestic Patent References:
| JP2007324189A | ||||
| JP2001358204A | ||||
| JP6000644U | ||||
| JP2008053282A |
Attorney, Agent or Firm:
Toshio Inoue