Title:
アルミニウム膜形成用組成物及びアルミニウム膜の形成方法
Document Type and Number:
Japanese Patent JP5071668
Kind Code:
B2
Inventors:
Tatsuya Sakai
Yoji Matsuki
Yoji Matsuki
Application Number:
JP2008076638A
Publication Date:
November 14, 2012
Filing Date:
March 24, 2008
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
C09D5/24; C09D1/00; C09D185/00; C23C18/10; C23C18/14; H01L21/288
Domestic Patent References:
| JP2008024617A | ||||
| JP2007210816A | ||||
| JP2007146257A | ||||
| JP2007146256A | ||||
| JP2006237392A | ||||
| JP2006213943A | ||||
| JP2004006197A |
Attorney, Agent or Firm:
Masataka Oshima
Hideo Katsumata
Taizo Shiraishi
Hideo Katsumata
Taizo Shiraishi