Title:
基板上に堆積した膜との相互作用のための均一なラインビームとしてレーザ光を整形するシステム及び方法
Document Type and Number:
Japanese Patent JP5107929
Kind Code:
B2
Abstract:
Systems and methods are disclosed for shaping and homogenizing a laser beam for interaction with a film. The shaping and homogenizing system may include a lens array and a lens that is positioned to receive laser light from the lens array and produce a respective elongated image in a plane for each lens in the lens array. In addition, the system may include a beam stop having an edge that is positioned in the plane, and a moveable mount rotating a lens of the lens array to vary an alignment between one of the elongated images and the beam stop edge.
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Inventors:
Akins Robert Pea
Sandstrom Richard El
Sandstrom Richard El
Application Number:
JP2008537819A
Publication Date:
December 26, 2012
Filing Date:
October 20, 2006
Export Citation:
Assignee:
Cymer Incorporated
International Classes:
H01L21/20; H01L21/268; H01L21/265
Domestic Patent References:
| JP2001156016A | ||||
| JP2000091264A | ||||
| JP2003151915A |
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda