Title:
光源制御回路および直接露光装置
Document Type and Number:
Japanese Patent JP5127677
Kind Code:
B2
Inventors:
Tomoki Kobayashi
Application Number:
JP2008299930A
Publication Date:
January 23, 2013
Filing Date:
November 25, 2008
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
H01S5/0683
Domestic Patent References:
| JP951138A | ||||
| JP9198696A | ||||
| JP2003224326A | ||||
| JP2007329436A | ||||
| JP2003218459A | ||||
| JP6296057A | ||||
| JP2006186291A | ||||
| JP10112579A | ||||
| JP4134639A |
Foreign References:
| WO2006137440A1 |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Higuchi Souji
Kurachi Yasuyuki
Jun Tsuruta
Higuchi Souji
Kurachi Yasuyuki