Title:
被処理体の支持機構、支持方法およびそれを備えた搬送システム
Document Type and Number:
Japanese Patent JP5141707
Kind Code:
B2
Abstract:
A processing-object-supporting mechanism includes at least three devices each including a lift pin, a motor, and a drive controller. The lift pin contacts a processing object to support the processing object. The processing object is transferred between a conveying arm and the processing-object-supporting mechanism. The motor lifts and lowers the lift pin. The drive controller is configured to control the motor. The drive controller of each of the at least three devices is configured to control the motor of each of the at least three devices independently.
Inventors:
Toru Kayama
Tadataka Noguchi
Akihito Toyota
Yoshihiro Kusama
Tadataka Noguchi
Akihito Toyota
Yoshihiro Kusama
Application Number:
JP2010068567A
Publication Date:
February 13, 2013
Filing Date:
March 24, 2010
Export Citation:
Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
H01L21/677; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2002064132A | ||||
| JP2006237262A | ||||
| JP10092916A | ||||
| JP63028035A | ||||
| JP2009016851A | ||||
| JP2008060402A | ||||
| JP2006344675A | ||||
| JP2003203965A |
Attorney, Agent or Firm:
Hiroaki Sakai