Title:
シリコン精製装置
Document Type and Number:
Japanese Patent JP5148784
Kind Code:
B1
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Inventors:
Yoshihiko Nagata
Yuji Yamazaki
Makino Hideo
Yuji Yamazaki
Makino Hideo
Application Number:
JP2012530812A
Publication Date:
February 20, 2013
Filing Date:
February 13, 2012
Export Citation:
Assignee:
Sharp Corporation
International Classes:
C01B33/037
Domestic Patent References:
JP2000351616A | 2000-12-19 | |||
JP2001223172A | 2001-08-17 | |||
JPH02204320A | 1990-08-14 |
Attorney, Agent or Firm:
Fukami patent office