Title:
ウエーハの搬出方法
Document Type and Number:
Japanese Patent JP5179928
Kind Code:
B2
Inventors:
Kubo Tetsuo
Application Number:
JP2008103177A
Publication Date:
April 10, 2013
Filing Date:
April 11, 2008
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/304; B24B41/06; H01L21/677
Domestic Patent References:
| JP7263324A | ||||
| JP7263325A | ||||
| JP2000326217A | ||||
| JP2003077982A | ||||
| JP2007012737A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki