To prevent leakage of light on a plurality of horizontal CCD sides, and reduce etching damage on a transfer electrode.
Other second wiring layers 51-54 are arranged between the transfer electrodes 21-24 arranged on the horizontal CCDs 11, 12, and a plurality of first wiring layers 31-34 arranged above the transfer electrodes 21-24 for driving the transfer electrodes. Thereby, a depth of a contact hole formed for electrical connection between the second wiring layers 51-54 and the transfer electrodes 21-24 is reduced. In addition to the first wiring layers 31-34 arranged above the transfer electrodes 21-24, the second wiring layers 51-54 are arranged near the transfer electrodes in lower positions of the first wiring layers 31-34.
COPYRIGHT: (C)2010,JPO&INPIT
| JP2006339518A | ||||
| JP786571A |
Takaaki Yasumura
Takeshi Oshio