Title:
ゲッタポンプ及びイオンポンプを具備する複合排気システム
Document Type and Number:
Japanese Patent JP5302386
Kind Code:
B2
Abstract:
A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.
Inventors:
Ferris, Michael Lawrence
Andrea, Conte
Andrea, Conte
Application Number:
JP2011501237A
Publication Date:
October 02, 2013
Filing Date:
March 26, 2009
Export Citation:
Assignee:
Saes Getters Sochieta Per Azioni
International Classes:
H01J41/12; F04B37/02; F04B37/04
Domestic Patent References:
| JP3222876A | ||||
| JP200698898A | ||||
| JP62218834A | ||||
| JP6163757U |
Attorney, Agent or Firm:
Atsushi Aoki
Jun Tsuruta
Tetsuro Shimada
Takuya Shinoda
Shinji Mitsuhashi
Yuichi Morimoto
Jun Tsuruta
Tetsuro Shimada
Takuya Shinoda
Shinji Mitsuhashi
Yuichi Morimoto