Title:
局所密閉型清浄化装置
Document Type and Number:
Japanese Patent JP5307507
Kind Code:
B2
Inventors:
Hiroshi Gomi
Toshihiko Miyajima
Toshihiko Miyajima
Application Number:
JP2008281404A
Publication Date:
October 02, 2013
Filing Date:
October 31, 2008
Export Citation:
Assignee:
Takasago Thermal Engineering Co., Ltd.
tdk Corporation
tdk Corporation
International Classes:
H01L21/304; F24F7/06; H01L21/02
Domestic Patent References:
| JP10340874A | ||||
| JP2002359180A | ||||
| JP2005303042A | ||||
| JP2006134944A | ||||
| JP2005283049A |
Attorney, Agent or Firm:
Yoshiyuki Kawaguchi
Tsutomu Toyama
Katsuhiko Imahori
Tsutomu Toyama
Katsuhiko Imahori