Title:
熱処理装置
Document Type and Number:
Japanese Patent JP5349802
Kind Code:
B2
Inventors:
Tatsufumi Kusuda
Application Number:
JP2008001276A
Publication Date:
November 20, 2013
Filing Date:
January 08, 2008
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
H01L21/26
Domestic Patent References:
| JP2003007633A | ||||
| JP2006261695A | ||||
| JP2003289049A | ||||
| JP2003282436A | ||||
| JP2009164321A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita