Title:
基板の処理装置及び処理方法
Document Type and Number:
Japanese Patent JP5352388
Kind Code:
B2
Inventors:
Keigo Omori
Akinori Iso
Yuichi Imaoka
Akinori Iso
Yuichi Imaoka
Application Number:
JP2009202843A
Publication Date:
November 27, 2013
Filing Date:
September 02, 2009
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
H01L21/306; B08B3/02; H01L21/027; H01L21/304
Domestic Patent References:
| JP2004275989A | ||||
| JP2003297799A | ||||
| JP200425038A | ||||
| JP2006135162A |
Attorney, Agent or Firm:
Kurata Masatoshi
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Katsumura Hiro
Shoji Kawai
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori
Takuzo Ichihara
Yamashita Gen