Title:
成膜装置
Document Type and Number:
Japanese Patent JP5378192
Kind Code:
B2
Inventors:
Yasuo Shimizu
Katsuhiko Mori
Koichi Matsumoto
Tomohiko Okayama
Morioka Kazu
Katsuhiko Mori
Koichi Matsumoto
Tomohiko Okayama
Morioka Kazu
Application Number:
JP2009286761A
Publication Date:
December 25, 2013
Filing Date:
December 17, 2009
Export Citation:
Assignee:
ULVAC, Inc.
International Classes:
C23C16/509; H01L21/205
Domestic Patent References:
| JP2007507104A |
Foreign References:
| WO2009148087A1 |
Attorney, Agent or Firm:
Masatake Shiga
Shingo Suzuki
Shingo Suzuki