Title:
半導体検査装置
Document Type and Number:
Japanese Patent JP5391787
Kind Code:
B2
Inventors:
Exit Kazuhide
Application Number:
JP2009093576A
Publication Date:
January 15, 2014
Filing Date:
April 08, 2009
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
B65B15/04
Domestic Patent References:
| JP61104908A | ||||
| JP2001287709A | ||||
| JP11348917A | ||||
| JP61309A |
Attorney, Agent or Firm:
Mamoru Takada
Hideki Takahashi
Hideki Takahashi