Title:
研磨パッドのコンディショナー
Document Type and Number:
Japanese Patent JP5422262
Kind Code:
B2
Inventors:
Hiroyuki Senoo
Akira Isobe
Akira Isobe
Application Number:
JP2009132593A
Publication Date:
February 19, 2014
Filing Date:
June 01, 2009
Export Citation:
Assignee:
Nitta Haas Co., Ltd.
International Classes:
B24B53/12; B24B53/02; B24D3/00; B24D7/14; H01L21/304
Domestic Patent References:
| JP54099195U | ||||
| JP56083366U | ||||
| JP64051267A | ||||
| JP2006247834A |
Attorney, Agent or Firm:
Keiichiro Saikyo