Title:
エキシマレーザ装置
Document Type and Number:
Japanese Patent JP5429956
Kind Code:
B2
Inventors:
Youichi Sasaki
Tsukasa Hori
Tsukasa Hori
Application Number:
JP2008213530A
Publication Date:
February 26, 2014
Filing Date:
August 22, 2008
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H01S3/03; H01L21/027
Domestic Patent References:
| JP3274780A | ||||
| JP1182642A | ||||
| JP856035A | ||||
| JP2238200A | ||||
| JP2003283011A | ||||
| JP1126405A | ||||
| JP95149A | ||||
| JP61171973A | ||||
| JP5748358U |
Attorney, Agent or Firm:
Ebisu International Patent Office
Takashi Koyama
Teiji Tanaka
Ryukichi Abe
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa
Takashi Koyama
Teiji Tanaka
Ryukichi Abe
Kenji Aoki
Hiroshi Nagisawa
Akira Yonezawa