Title:
剥離装置、剥離システム、剥離方法、プログラム及びコンピュータ記憶媒体
Document Type and Number:
Japanese Patent JP5455987
Kind Code:
B2
Inventors:
Osamu Hirakawa
Naoto Yoshitaka
Masataka Matsunaga
Norihiko Okamoto
Naoto Yoshitaka
Masataka Matsunaga
Norihiko Okamoto
Application Number:
JP2011155992A
Publication Date:
March 26, 2014
Filing Date:
July 14, 2011
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/02; H01L21/304; H01L21/677
Domestic Patent References:
| JP11195563A | ||||
| JP2000150611A | ||||
| JP2009249514A | ||||
| JP2002100595A | ||||
| JP2003163338A | ||||
| JP2001094081A | ||||
| JP2011071331A |
Foreign References:
| WO2008072543A1 |
Attorney, Agent or Firm:
Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara
Miaki Kametani
Koji Hagiwara