Title:
露光装置、露光方法、及び表示用パネル基板の製造方法
Document Type and Number:
Japanese Patent JP5456607
Kind Code:
B2
Inventors:
Mochizuki Masaaki
Application Number:
JP2010161279A
Publication Date:
April 02, 2014
Filing Date:
July 16, 2010
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
G03F7/20; G02F1/13; G02F1/1343; H01L21/027
Domestic Patent References:
| JP200865094A | ||||
| JP2007101687A | ||||
| JP2006264319A | ||||
| JP200713035A | ||||
| JP200889868A |
Attorney, Agent or Firm:
Kozo Takahashi
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