分光エリプソメータ

Title:

分光エリプソメータ

Document Type and Number:

Japanese Patent JP5461020

Kind Code:

B2

Abstract:

A spectroscopic ellipsometer can compare data different in a measurement condition and facilitate setting an initial value of fitting data even for an inexperienced operator such as a beginner. The spectroscopic ellipsometer includes a reference data storage part storing therein reference data to be compared with measurement data, a conversion operation part converting the measurement data or the reference data into comparable data, so that the measurement data can be compared with the reference data, and a comparison and determination part comparing the measurement data with the reference data made comparable by the conversion operation part with each other and determining a coincidence between the measurement data and the reference data.

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Inventors:

Satoru Tanaka

Application Number:

JP2009014240A

Publication Date:

April 02, 2014

Filing Date:

January 26, 2009

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