Title:
転写装置および転写方法
Document Type and Number:
Japanese Patent JP5469941
Kind Code:
B2
Inventors:
Mitsunori Kokubo
Shinya Itani
Takaharu Tashiro
Akihiro Otomo
Shinya Itani
Takaharu Tashiro
Akihiro Otomo
Application Number:
JP2009164569A
Publication Date:
April 16, 2014
Filing Date:
July 13, 2009
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
B29C59/02; H01L21/027
Domestic Patent References:
| JP2007095248A | ||||
| JP2006018977A |
Foreign References:
| WO2007105474A1 |
Attorney, Agent or Firm:
Hidekazu Miyoshi
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu
Iwa Saki Kokuni
Masakazu Ito
Shunichi Takahashi
Toshio Takamatsu