Title:
真空ドレン排出装置
Document Type and Number:
Japanese Patent JP5493775
Kind Code:
B2
Inventors:
Tsutomu widthda
Application Number:
JP2009270183A
Publication Date:
May 14, 2014
Filing Date:
November 27, 2009
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
F16T1/20; F16K31/18; F16K51/02; F16T1/18
Domestic Patent References:
JP50147228U | ||||
JP2221800A | ||||
JP9014145A | ||||
JP4366092A |
Attorney, Agent or Firm:
Mikio Yoshimiya