Title:
誘導結合型プラズマ処理装置及び方法
Document Type and Number:
Japanese Patent JP5500098
Kind Code:
B2
Inventors:
Tomohiro Okumura
Application Number:
JP2011035664A
Publication Date:
May 21, 2014
Filing Date:
February 22, 2011
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H05H1/30; C23C16/513; H01L21/205; H01L21/3065; H01L21/31; H05H1/24
Domestic Patent References:
| JP2006297339A | ||||
| JP2010251162A | ||||
| JP2007188823A | ||||
| JP2007287452A | ||||
| JP2009545165A | ||||
| JP10189293A | ||||
| JP2008117533A | ||||
| JP11317299A | ||||
| JP2005175460A | ||||
| JP11026187A | ||||
| JP2003309112A |
Attorney, Agent or Firm:
Tokuda Yoshiaki
Kentaro Fujii
Ikuro Terauchi
Kentaro Fujii
Ikuro Terauchi