To provide a piezoelectric element made by forming a through hole electrode excellent in reliability in piezoelectric ceramics, and also to provide its manufacturing method.
A piezoelectric element 10 is manufactured by a process to prepare a through hole in a predetermined position of a green sheet made by shape forming a piezoelectric material, to fill up the through hole with a first conductive paste, after that, to bond in piles a plurality of the green sheets so that the through holes are superposed, and to calcinate them; a process to planarize simultaneously two opposite planes in which a through hole electrode 15 formed by the through hole in the obtained calcinated body is exposed; and a process to apply respectively a second conductive paste to the thus planarized planes, and to prepare surface electrodes 13a, 13b, 14 in this planarized plane by calcinating them at the temperature lower than calcinating temperature in the calcinating process.
COPYRIGHT: (C)2008,JPO&INPIT
Urakami Toshifumi
Kiyoshi Oshima
Norifumi Iwaki
Masako Kataoka
Nippon Ceratech Co., Ltd.
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