Title:
放電開始を判定する機能を有するガスレーザ発振器
Document Type and Number:
Japanese Patent JP5513571
Kind Code:
B2
Inventors:
Honda Masahiro
Toru Nakai
Toru Nakai
Application Number:
JP2012196365A
Publication Date:
June 04, 2014
Filing Date:
September 06, 2012
Export Citation:
Assignee:
FANUC Corporation
International Classes:
H01S3/097
Domestic Patent References:
| JP2011222586A | ||||
| JP7039166A | ||||
| JP9064436A | ||||
| JP4056372A | ||||
| JP2011129670A | ||||
| JP2010212560A | ||||
| JP2010212562A |
Attorney, Agent or Firm:
Atsushi Aoki
Tetsuro Shimada
Shinji Mitsuhashi
Ryuichi Nishimura
Hirose Shigeki
Kazuo Maejima
Tetsuro Shimada
Shinji Mitsuhashi
Ryuichi Nishimura
Hirose Shigeki
Kazuo Maejima